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Low-cost thermal flow sensor for home-appliances applications

Author(s):
Sabate, N. ( Ctr. National de Microelectronica (Spain) )
Gracia, I.
Cane, C.
Berganzo, J. ( IKERLAN (Spain) )
Puicorbe, J. ( Univ. de Barcelona (Spain) )
Morante, J.R.
1 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
549
Page(to):
555
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

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