Blank Cover Image

Large-scale metal MEMS mirror arrays with integrated electronics

Author(s):
Bifano, T.G. ( Boston Univ. (USA) )
Bierden, P.A. ( Boston Micromachines Corp. (USA) )
Cornelissen, S. ( Boston Univ. (USA) )
Dimas, C.E. ( Boston Micromachines Corp. (USA) )
Lee, H. ( Boston Univ. (USA) )
Miller, M. ( Michigan Technological Univ. (USA) )
Perreault, J.A. ( Boston Univ. (USA) )
2 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
467
Page(to):
476
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Large-scale polysilicon surface-micromachined spatial light modulator

Dimas, C.E., Perreault, J., Cornelissen, S., Dyson, H., Krulevitch, P.A., Bierden, P.A., Bifano, T.G.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Microelectromechanical spatial light modulators with integrated electronics

Cornelissen,S., Bifano,T.G., Bierden,P.A.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Large-scale polysilicon surface micromachined spatial light modulator

Dimas, C.E., Perreault, J., Cornelissen, S., Dyson, H., Krulevitch, P.A., Bierden, P.A., Bifano, T.G.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Polysilicon surface-micromachined spatial light modulator with novel electronic integration

Dimas, C.E., Bifano, T.G., Bierden, P.A., Perrault, J.A., Krulevitch, P., Roehnelt, R.T., Cornelissen, S.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings MEMS spatial light modulators with integrated electronics

Becker, T., Bifano, T.G., Lee, H., Miller, M., Bierden, P.A., Cornelissen, S.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Micromachined deformable mirror for optical wavefront compensation

Bifano,T.G., Perreault,J.A., Bierden,P.A.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings MEMS spatial light modulators with integrated electronics

Becker, T., Bifano, T.G., Lee, H., Miller, M., Bierden, P.A., Cornelissen, S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

S. A. Cornelissen, P. A. Bierden, T. G. Bifano

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings MEMS spatial light modulators with integrated electronics

Cornelissen,S., Bifano,T.G., Bierden,P.A.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Development of a 4096 element MEMS continuous membrane deformable mirror for high contrast astronomical imaging [6306-07]

Cornelissen S. A., Bierden P. A., Bifano T. G.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Micromchined deformable mirrors for adaptive optics

Bifano, T.G., Perreault, J.A., Bierden, P.A., Dimas, C.E.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Manufacturing of an optical-quality mirror system for adaptive optics

Perreault,J.A., Bierden,P.A., Horenstein,M.N., Bifano,T.G.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12