Blank Cover Image

Development of a new contact-type piezoresistive micro-shear-stress sensor

Author(s):
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
285
Page(to):
295
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Development of a pyroelectric thin film infrared sensor by micro-opto-electro-mechanical system(MOEMS)technology

Ho,J.-J., Fang,Y.K., Hsieh,M.C., Chen,C.Y., Ting,S.F., Lin,S.M., Wu,K.H.

SPIE - The International Society for Optical Engineering
7 Technical Paper Surface Shear Stress Reduction with MEMS Sensors/Actuators in Turbulent Boundary Layers

Lew, J., Huang, A., Jiang, F., Tai, Y., Ho,C.

American Institute of Aeronautics and Astronautics
2 Conference Proceedings Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by …

Ho,J.-J., Fang,Y.K., Chen,C.Y., Chen,G.S., Ju,M.S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Double bridge technique for temperature compensation of piezoresistive pressure sensor

Hsieh, P.T., Chang, Y.M., Xu, J.M., Uang, C.M.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Wall shear stress and pressure sensor development for active control of flow

Tsamados, D.M., Meunier, D., Laghrouche, M., Boussey, J., Tardu, S.F.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Performance analysis and development of hith-temperature β-SiC/Si optoelectronic devices with porous silicon substrate

Ho,J.-J., Fang,Y.-K., Hsieh,W.-T., Chen,C.-Y., Chia,W.-K.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings New Metallization Scheme for Low Resistance Ohmic Contacts to P-Type GaN *

Wang, S.C., Chu, C.F, Yu, C.C., Wang, Y.K., Tsai, J.Y., Lai., atid F.I.

Electrochemical Society
10 Conference Proceedings New instrument for measuring mechanical compliance of microsystems

Ju,B., Liu,K.-K., Ling,S.F.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Performance analysis and development of high-speed p-i-n infrared sensors prepared on crystalline silicon substrates

Chen,C.-Y., Ho,J.-J., Fang,Y.-K., Chen,S.-F.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings 190r. Development of An Analytic Fluctuation Term and Its Application to Saft Eos

Ju Ho Lee, M.S Shin, H. Kim

American Institute of Chemical Engineers
6 Conference Proceedings Development of novel piezoresistive sensor

Lin,Z., Fang,W.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Performance analysis of an infrared sensor (metal/ferroelectric/semiconductor) with highspeed response

Chen, C.-Y., Ho, J.-J., Fang, Y.-K., Chen, F.-Y.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12