Process development of 6-in EUV mask with TaBN absorber
- Author(s):
Shoki, T. ( HOYA Corp. (Japan) ) Hosoya, M. Kinoshita, T. Kobayashi, H. Usui, Y. Ohkubo, R. Ishibashi, S. Nagarekawa, O. - Publication title:
- Photomask and Next-Generation Lithography Mask Technology IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4754
- Pub. Year:
- 2002
- Page(from):
- 857
- Page(to):
- 864
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445179 [0819445177]
- Language:
- English
- Call no.:
- P63600/4754
- Type:
- Conference Proceedings
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