Comparsion and correlation of VSS simulation results using images from different inspection systems
- Author(s):
Hung, K. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) ) Lin, D. Chou, R.L. Yang, S.C. Lee, D. Tseng, A. Unno, H. Chen, J.-H. ( Numerical Technologies, Inc. (USA) ) Huang, J. H. - Publication title:
- Photomask and Next-Generation Lithography Mask Technology IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4754
- Pub. Year:
- 2002
- Page(from):
- 666
- Page(to):
- 672
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445179 [0819445177]
- Language:
- English
- Call no.:
- P63600/4754
- Type:
- Conference Proceedings
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