Application of multiple-wavelength absorption endpoint system in photomask dry etcher
- Author(s):
- Min, D.-S. ( PKL (Korea) )
- Jang, P.-J.
- Kwon, H.-J.
- Choi, B.-Y.
- Jeong, S.H.
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4754
- Pub. Year:
- 2002
- Page(from):
- 341
- Page(to):
- 349
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445179 [0819445177]
- Language:
- English
- Call no.:
- P63600/4754
- Type:
- Conference Proceedings
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