Comparison between positive and negative 50-k eV E-beam CAR for 0.1-μm generation
- Author(s):
Lin, D. ( Toppan Chunghwa Electronics Co., Ltd. (Taiwan) ) Hung, K. Lee, D. Chou, R.L. Unno, H. Yang, S.C. - Publication title:
- Photomask and Next-Generation Lithography Mask Technology IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4754
- Pub. Year:
- 2002
- Page(from):
- 241
- Page(to):
- 251
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445179 [0819445177]
- Language:
- English
- Call no.:
- P63600/4754
- Type:
- Conference Proceedings
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