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A Low Temperature Technology on the Base of Hydrogen Enhanced Thermal Donor Formation for Future High-Voltage Applications

Author(s):
Job, R.
Ulyashin, A.G.
Fahrner, W.R.
Niedernostheide, F.J.
Schulze, H.J.
Simoen, E.
Claeys, C.L.
Tonelli, G.
3 more
Publication title:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4746
Pub. date:
2002
Vol.:
VOL-1
Page(from):
405
Page(to):
413
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445001 [0819445002]
Language:
English
Call no.:
P63600/4746
Type:
Conference Proceedings

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