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Optimization of design and technology for uncooled poly-SiGe microbolometer arrays

Author(s):
Leonov, V.N. ( XenlCs N.V. (Belgium) )
Perova, N.A.
Vermeiren, J.P.
Grietens, B.
Goessens, C.
De Moor, P. ( IMEC (Belgium) )
Van Hoof, C.A.
2 more
Publication title:
Infrared Detectors and Focal Plane Arrays VII : 2-3 April 2002, Orlando, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4721
Pub. Year:
2002
Page(from):
122
Page(to):
133
Pages:
12
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444714 [0819444715]
Language:
English
Call no.:
P63600/4721
Type:
Conference Proceedings

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