Optimization of design and technology for uncooled poly-SiGe microbolometer arrays
- Author(s):
Leonov, V.N. ( XenlCs N.V. (Belgium) ) Perova, N.A. Vermeiren, J.P. Grietens, B. Goessens, C. De Moor, P. ( IMEC (Belgium) ) Van Hoof, C.A. - Publication title:
- Infrared Detectors and Focal Plane Arrays VII : 2-3 April 2002, Orlando, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4721
- Pub. Year:
- 2002
- Page(from):
- 122
- Page(to):
- 133
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444714 [0819444715]
- Language:
- English
- Call no.:
- P63600/4721
- Type:
- Conference Proceedings
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