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Microcharacterization of MEMS ultrasonic transducers using laser interferometry

Author(s):
Publication title:
Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4703
Pub. Year:
2002
Page(from):
184
Page(to):
193
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444516 [0819444510]
Language:
English
Call no.:
P63600/4703
Type:
Conference Proceedings

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