Finite element simulations of nonlinear vibrations of atomic force microscope cantilevers
- Author(s):
- Shen, K. ( Univ. of Nebraska/Lincoln (USA) )
- Turner, J.A.
- Publication title:
- Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4703
- Pub. Year:
- 2002
- Page(from):
- 93
- Page(to):
- 104
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444516 [0819444510]
- Language:
- English
- Call no.:
- P63600/4703
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Characterization of the Mechanical Properties of Thin Film Cantilevers with the Atomic Force Microscope
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Sensitivity of atomic force microscope vibration modes to changes in surface stiffness
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
American Society of Mechanical Engineers |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Fabrication of polymer cantilevers for force-controlled atomic force microscope
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
Kluwer Academic Publishers |
12
Conference Proceedings
Direct three-dimensional nanoscale thermal lithography at high speeds using heated atomic-force microscope cantilevers
SPIE - The International Society of Optical Engineering |