Double bridge technique for temperature compensation of piezoresistive pressure sensor

Double bridge technique for temperature compensation of piezoresistive pressure sensor

Author(s):

Hsieh, P.T. ( I-Shou Univ. (Taiwan) )
Chang, Y.M. ( Taiwan Silicon Microelectronics Corp. )
Xu, J.M.
Uang, C.M. ( I-Shou Univ. (Taiwan) )

Publication title:

Smart structures and materials 2002 : smart structures and integrated systems : 18-21 March 2002, San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4701

Pub. Year:

2002

Page(from):

627

Page(to):

633

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444493 [0819444499]

Language:

English

Call no.:

P63600/4701

Type:

Conference Proceedings

Details

TDL ID:	ZA00012536
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2002
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2002.03.18-2002.03.21

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