Vertical electrostatic actuator with extended digital range via tailored topology
- Author(s):
- Zhang, Y. ( Univ. of Colorado/Boulder (USA) )
- Dunn, M.L.
- Publication title:
- Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4700
- Pub. Year:
- 2002
- Page(from):
- 147
- Page(to):
- 156
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444486 [0819444480]
- Language:
- English
- Call no.:
- P63600/4700
- Type:
- Conference Proceedings
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