Development of micromachined RF switches with piezofilm actuation

Development of micromachined RF switches with piezofilm actuation

Author(s):

Fox, C.H.J. ( Univ. of Nottingham (UK) )
Chen, X.
Jiang, H.W. ( Cranfield Univ. (UK) )
Kirby, P.B.
McWilliam, S. ( Univ. of Nottingham (UK) )

Publication title:

Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4700

Pub. Year:

2002

Page(from):

40

Page(to):

49

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444486 [0819444480]

Language:

English

Call no.:

P63600/4700

Type:

Conference Proceedings

Details

TDL ID:	ZA00012535
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2002
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2002.03.18-2002.03.21

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