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Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)

Author(s):
Thomas, C.E., Jr. ( nLine Corp.(USA) )
Bahm, T.M.
Baylor, L.R. ( Oak Ridge National Lab.(USA) )
Bingham, P.R.
Burns, S.W. ( nLine Corp.(USA) )
Chidley, M.D. ( Oak Ridge National Lab.(USA) )
Dai, X.L. ( nLine Corp.(USA) )
Delahanty, R.J.
Doti, C.J.
El-Khashab, A.
Fisher, R.L.
Gilbert, J.M.
Goddard, J.S. ( Oak Ridge National Lab.(USA) )
Hanson, G.R.
Hickson, J.D. ( nLine Corp.(USA) )
Hunt, M.A.
Hylton, K.W. ( Oak Ridge National Lab.(USA) )
John, G.C. ( nLine Corp.(USA) )
Jones, M.L.
MacDonald, K.R.
Mayo, M.W.
McMackin, I.
Patek, D.R. ( Oak Ridge National Lab.(USA) )
Price, J.H. ( nLine Corp.(USA) )
Rasmussen, D.A. ( Oak Ridge National Lab.(USA) )
Schaefer, L.J. ( nLine Corp.(USA) )
Scheidt, T.R.
Schulze, M.A.
Schumaker, P.D.
Shen, B.
Smith, R.G.
Su, A.N.
Tobin, K.W., Jr. ( Oak Ridge National Lab.(USA) )
Usry, W.R. ( nLine Corp.(USA) )
voelkl, E.
Weber, K.S.
Jones, P.G.
Owen, R.W.
33 more
Publication title:
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4692
Pub. Year:
2002
Page(from):
180
Page(to):
194
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444394 [0819444391]
Language:
English
Call no.:
P63600/4692
Type:
Conference Proceedings

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