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Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures(AFS-TS)

Author(s):
Doong, K.Y.-Y. ( Taiwan Semiconductor Manufacturing Co., Ltd. and National Tsing-Hua Univ. (Taiwan) )
Hsieh, S. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Lin, S.C.
Wang, J.R. ( National Tsing-Hua Univ. (Taiwan) )
Shen, B. ( Taiwan Semiconductor Manufacturing Co., Ltd. )
Hung, L.J.
Guo, J.C.
Chen, I.C.
Young, K.L.
Hsu, C.C.-H. ( National Tsing-Hua Univ.(Taiwan) )
5 more
Publication title:
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4692
Pub. Year:
2002
Page(from):
81
Page(to):
87
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444394 [0819444391]
Language:
English
Call no.:
P63600/4692
Type:
Conference Proceedings

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