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High-repetition-rate excimer lasers for 193-nm lithography

Author(s):
Zschocke, W. ( Lambda Physik GmbH (Germany) )
Albrecht, H.-S.
Schroeder, T.
Bragin, I.
Lokai, P.
Seddighi, F.
Reusch, C.
Cortona, A.
Schmidt, K.
Paetzel, R.
Vogler, K.
6 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. Year:
2002
Vol.:
Part Two
Page(from):
1722
Page(to):
1733
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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