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Is it possible to improve MEEF?

Author(s):
Oh, S.-H. ( Samsung Electronics Co., Ltd. (Korea) )
Kim, H.-K.
Kim, D.-J.
Kim, Y.-S.
Suh, C.-S.
Koh, Y.-S.
Song, C.-L.
2 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. Year:
2002
Vol.:
Part Two
Page(from):
1383
Page(to):
1391
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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