Tuning and simulating a 193-nm resist for 2D applications
- Author(s):
Howard, W.B. ( KLA-Tencor Corp. (USA) ) Wiaux, V. ( IMEC (Belgium) ) Ercken, M. Bui, B. ( JSR Corp. (Belgium) ) Byers, J.D. ( KLA-Tencor Corp. (USA) ) Pochkowski, M. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 1190
- Page(to):
- 1198
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
193-nm photoresists at 130-nm node:which lithographic performances for which chemical platform?
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Development of an operational high refractive index resist for 193nm immersion lithography
Society of Photo-optical Instrumentation Engineers |
4
Conference Proceedings
Novel functional nortricyclene polymers and copolymers for 248-and 193-nm chemically amplified resists
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Structurally variable cyclopolymers with excellent etch resistance and their application to 193-nm lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Reactive ion etching of 193-nm resist candidates: current platforms and future requirements
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |