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157-nm pellicles: polymer design for transparency and lifetime

Author(s):
French, R.H. ( DuPont Co. (USA) )
Wheland, R.C.
Qiu, W.
Lemon, M.F.
Blackman, G.S.
Zhang, E. ( DuPont Photomasks, Inc. (USA) )
Gordon, J.
Liberman, V. ( MIT Lincoln Lab. (USA) )
Grenville, A. ( Intel Corp. (USA) )
Kunz, R.R. ( MIT Lincoln Lab. (USA) )
Rothschild, M.
6 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. Year:
2002
Vol.:
Part One
Page(from):
576
Page(to):
583
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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