157-nm pellicles: polymer design for transparency and lifetime
- Author(s):
French, R.H. ( DuPont Co. (USA) ) Wheland, R.C. Qiu, W. Lemon, M.F. Blackman, G.S. Zhang, E. ( DuPont Photomasks, Inc. (USA) ) Gordon, J. Liberman, V. ( MIT Lincoln Lab. (USA) ) Grenville, A. ( Intel Corp. (USA) ) Kunz, R.R. ( MIT Lincoln Lab. (USA) ) Rothschild, M. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 576
- Page(to):
- 583
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Behavior of candidate organic pellicle materials under 157-nm laser irradiation
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
157-nm pellicles for photolithography: mechanistic investigation of the deep-UV photolysis of fluorocarbons
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Fluoropolyrners for 157-nm lithography:optical properties from VUV absorbance and ellipsometry measurements
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Accelerated damage to blank and antireflectance-coated CaF2 surfaces under 157-nm laser irradiation
SPIE-The International Society for Optical Engineering |