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Assessment of OPC effectiveness using two-dimensional metrics

Author(s):
Wiaux, V. ( IMEC (Belgium) )
Philipsen, V.
Jonckheere, R.
Vandenberghe, G.
Verhaegen, S.
Hoffmann, T.
Ronse, K.
Howard, W.B. ( KLA-Tencor Corp. (USA) )
Maurer, W.
Preil, M.E.
5 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. date:
2002
Vol.:
Part One
Page(from):
395
Page(to):
406
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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