Hybrid PPC methodology and implementation in the correction of etch proximity
- Author(s):
Park, C.-H. ( Samsung Electronics Co., Ltd. (Korea) ) Rhie, S.-U. Chio, S.-H. Kim, D.-H. Park, J.-S. Kim, Y.-H. Yoo, M.-H. Kong, J.-T. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 369
- Page(to):
- 376
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
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