Analysis of focus errors in lithography using phase-shift monitors

Analysis of focus errors in lithography using phase-shift monitors

Author(s):

La Fontaine, B. ( Advanced Micro Devices, Inc. (USA) )

Dusa, M.V. ( ASML (USA) )

Krist, J.

Acheta, A. ( Advanced Micro Devices, Inc. (USA) )

Kye, J.

Levinson, H.J.

Luijten, C. ( ASML (USA) )

Sager, C.B. ( Benchmark Technoloties, Inc. (USA) )

Thomas, J. ( Advanced Micro Devices, Inc. (USA) )

van Praagh, J. ( ASML (Netherlands) )

5 more

Publication title:

Optical Microlithography XV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4691

Pub. Year:

2002

Vol.:

Part One

Page(from):

315

Page(to):

324

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444370 [0819444375]

Language:

English

Call no.:

P63600/4691

Type:

Conference Proceedings

Details

TDL ID:	ZA00012525
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2002 : 15th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2002.03.05-2002.03.08

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