CD uniformity improvement by active scanner corrections

CD uniformity improvement by active scanner corrections

Author(s):

van Schoot, J.B. ( ASML (Netherlands) )

Noordman, O.

Vanoppen, P.

Blok, F.

Yim, D. ( Hynix Semiconductor Inc. (Korea) )

Park, C.-H.

Cho, B.-H.

Theeuwes, T. ( ASML (Korea) )

Min, Y.-H.

4 more

Publication title:

Optical Microlithography XV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4691

Pub. date:

2002

Vol.:

Part One

Page(from):

304

Page(to):

314

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444370 [0819444375]

Language:

English

Call no.:

P63600/4691

Type:

Conference Proceedings

Details

TDL ID:	ZA00012525
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2002 : 15th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2002.03.05-2002.03.08

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