Blank Cover Image

Model-based design improvements for the 100-nm lithography generation

Author(s):
Lucas, K. ( Motorola (USA) )
Postnikov, S.V.
Patterson, K.
Yuan, C.-M.
Thomas, C.
Thompson, M.A.
Carter, R.
Litt, L.C.
Montgomery, P.K. ( Motorola (USA) )
Wimmer, K. ( Motorola (USA) )
5 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. date:
2002
Vol.:
Part One
Page(from):
215
Page(to):
226
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

Similar Items:

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Patterson, K., Litt, L.C., Maltabes, J.G., Hughes, G.P., Robertson, T., Montgomery, B.

SPIE-The International Society for Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Trouiller, Y., Postnikov, S.V., Lucas, K.D., Sundermann, F., Patterson, K., Belledent, J., Couderc, C., Rody, Y.F.

SPIE - The International Society of Optical Engineering

Postnikov,S.V., Lucas,K., Wimmer,K.

SPIE-The International Society for Optical Engineering

Kasprowicz, B.S., Conley, W.E., Litt, L.C., Van Den Broeke, D.J., Montgomery, P.K., Socha, R.J., Wu, W., Lucas, K.D., …

SPIE - The International Society of Optical Engineering

Postnikov, S.V., Lucas, K., Garza, C.M., Wimmer, K., LaCour, P., Word, J.C.

SPIE-The International Society for Optical Engineering

Montgomery, P.K., Lucas, K.D., Litt, L.C., Conley, W., Fanucchi, E., Van Wingerden, J., Vandenberghe, G., Wiaux, V., …

SPIE - The International Society of Optical Engineering

Conley, W., Montgomery, P.K., Lucas, K., Litt, L.C., Maltabes, J.G., Dieu, L., Hughes, G.P., Mellenthin, D.L., Socha, …

SPIE-The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Wimmer, K., Ivin, V., Rogov, A.

SPIE-The International Society for Optical Engineering

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Montgomery, P.K., Vandenberghe, G., Lucas, K.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12