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Advanced hybrid optical proximity correction system with OPC segment library and model-based correction module

Author(s):
Kotani, T. ( Toshiba Corp. (Japan) )
Kobayashi, S.
Ichikawa, H. ( Toshiba Microelectronics Corp. (Japan) )
Tanaka, S. ( Toshiba Corp. (Japan) )
Watanabe, S.
Inoue, S.
1 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. date:
2002
Vol.:
Part One
Page(from):
188
Page(to):
195
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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