Blank Cover Image

Fullerene incorporation in DNQ Novolak photoresist for increasing plasma etch resistance

Author(s):
Publication title:
Advances in Resist Technology and Processing XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4690
Pub. Year:
2002
Vol.:
Part Two
Page(from):
1224
Page(to):
1227
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444363 [0819444367]
Language:
English
Call no.:
P63600/4690
Type:
Conference Proceedings

Similar Items:

Benson, J.D., Stoltz, A.J., Jr., Kaleczyc, A.W., Martinka, M., Almeida, L.A., Boyd, P.R., Dinan, J.H.

SPIE-The International Society for Optical Engineering

Benson,J.D., Dinan,J.H., Waterman,J.R., Summers,C.J., Benz,R.D., Wagner,B.K., Pearson,S.D., Parikh,A., Jensen,J.J., …

SPIE-The International Society for Optical Engineering

Stoltz, A.J., Mason, Whitney, Benson, J.D., Dinan, J.H., McCormack, K., Kaleczyc, A.

Materials Research Society

H. Miyamoto, T. Nakamura, K. Inomata, T. Ota, A. Tsuji

Society of Photo-optical Instrumentation Engineers

Huang, J., Cha, D.K., Kaleczyc, A., Dinan, J.H., Carpenter, R.W., Kim, M.J.

Electrochemical Society

Rahman,M.D., Lu,P.-H., Cook,M.M., Kim,W.-K., Khanna,D.N.

SPIE-The International Society for Optical Engineering

Chung,S.-J., Schulz,J., Hein,H., Mohr,J.

SPIE - The International Society for Optical Engineering

Koshka, Y., Draper, W.A., Lakshman, R.Y., Scofield, J.D., Saddow, S.E.

Trans Tech Publications

Horn, S., Norton, P., Cincotta, T., Stoltz, A.J. Jr.,, Benson, J.D., Perconti, P., Campbell, J.

SPIE-The International Society for Optical Engineering

Koshka, Y., Draper, W.A., Lakshman, R.Y., Scofield, J.D., Saddow, S.E.

Trans Tech Publications

6 Conference Proceedings Advanced HgCdTe focal plane arrays

Chu, M., Gurgenian, H.K., Mesropian, S., Terterian, S., Wang, C.C., Benson, J.D., Dinan, J.H., Becker, L.S.R.

SPIE-The International Society for Optical Engineering

Taylor, P. J., Jesser, W. A., Simonis, G., Chang, W., Lara-Taysing, M., Bradshaw, J., Clark, W., Martinka, M., Benson, …

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12