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Novel approach for high resolution using cycloolefin-alt-maleic acid derivatives polymer for ArF lithography

Author(s):
Lee, J.-B. ( Korea Kumho Petrochemical Co., Ltd. )
Park, J.-H.
Seo, D.-C.
Kim, C.-M.
Lim, Y.-T.
Cho, S.-D.
Joo, H.-S.
Jeon, H.-P.
Kim, S.-J.
4 more
Publication title:
Advances in Resist Technology and Processing XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4690
Pub. Year:
2002
Vol.:
Part Two
Page(from):
623
Page(to):
630
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444363 [0819444367]
Language:
English
Call no.:
P63600/4690
Type:
Conference Proceedings

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