Impact on OPC treatment accuracy due to illumination pupil shape deviation for 110-nm target CD
- Author(s):
Roy, S. ( ASML MaskTools, Inc. (USA) ) Schlief, R.E. Hsu, S. Shi, X. Liebchen, A. Chen, J.F. Hansen, S.G. ( ASML (USA) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 876
- Page(to):
- 883
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
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