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Microeconomics of advanced process window control for 50-nm gates

Author(s):
Monahan, K.M. ( KLA-Tencor Corp. (USA) )
Chen, X.
Falessi, G.
Garvin, C.
Hankinson, M.
Lev, A.
Levy, A.
Sleesor, M.D.
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part One
Page(from):
624
Page(to):
635
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

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