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Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes

Author(s):
Matsui, M. ( Hitachi, Ltd. (Japan) )
Nozoe, M.
Arauchi, K. ( Hitachi ULSI Systems (Japan) )
Takafuji, A. ( Hitachi, Ltd. (Japan) )
Nishiyama, H.
Goto, Y.
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part One
Page(from):
584
Page(to):
592
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

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