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Simulation of imaging in projection microscope using multibeam probe

Author(s):
  • Ko, Y.-U. ( Univ. of Tennessee/Knoxville (USA) )
  • Joy, D.C. ( Univ. of Tennessee/Knoxville (USA) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. date:
2002
Vol.:
Part One
Page(from):
565
Page(to):
575
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

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