Electronic structure of chromium aluminum oxynitride by DV-Xa method and photoelectron spectroscopy
- Author(s):
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 455
- Page(to):
- 461
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
High transmittance attenuated phase shifting mask of chromium aluminum oxynitride
SPIE-The International Society for Optical Engineering |
Materials Research Society |
2
Conference Proceedings
Assessment of Localized Damage in Beam Structures Using Limited Modal Characteristics,#236
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |
9
Conference Proceedings
Changing Morphology and Crystal Structure in Ettringite by Trivalent Chromium
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Electrochemical AC Etching of Aluminum Foils in Hydrochloric Acid Electrolytes
Trans Tech Publications |
5
Conference Proceedings
Effects of pattern size, dual side patterning, and imprint materials in the fabrication of antireflective structure using nanoimprint
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
6
Conference Proceedings
Quality Improvement of 4″ 4H-SiC Crystal by Using Modified Seed Adhesion Method
Trans Tech Publications |
12
Conference Proceedings
Spectroscopic Analysis of Plasma Induced in Laser Welding of Aluminum Alloys
Trans Tech Publications |