Carbon nanotube scanning probe for surface profiling of DUV and 193-nm photoresist pattern
- Author(s):
Nguyen, C.V. ( NASA Ames Research Ctr. (USA) ) Stevens, R.M.D. Barber, J. Han, J. Meyyappan, M. Sanchez, M.I. ( IBM Almaden Research Ctr. (USA) ) Larson, C.E. Hinsberg, W.D. - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 58
- Page(to):
- 62
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
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