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Defect printability analysis study using virtual stepper system in a production environment

Author(s):
Chiou, S.Y. ( United Microelectronics Corp. (Taiwan) )
Lei, H.
Liu, W.J.
Chu, M.J.
Chiang, D.
Tuan, S. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Hong, C.-L.
Chang, M.
Chen, J.-H. ( Numerical Technologies, Inc. (USA) )
Chan, K.K.
Qian, Q.-D.
Cai, L.
Pang, L.Y.
8 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. date:
2002
Vol.:
Part One
Page(from):
23
Page(to):
34
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

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