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High-power laser-plasma x-ray source for lithography

Author(s):
Gaeta, C.J. ( JMAR Research, Inc. (USA) )
Rieger, H.
Turcu, I.C.E.
Forber, R.A.
Cassidy, K.L.
Campeau, S.M.
Powers, M.J.
Maldonado, J.R.
Morris, J.H.
Foster, R.M.
Smith, H.I. ( Massachusetts Institute of Technology (USA) )
Lim, M.H.
7 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part Two
Page(from):
818
Page(to):
833
Pages:
16
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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