PREVAIL: latest electron optics results
- Author(s):
Pfeiffer, H.C. ( IBM Microelectronics Div. (USA) ) Golladay, S.D. Gordon, M.S. Kendall, R.A. Lieberman, J.E. Rockrohr, J.D. Stickel, W. Yamaguchi, T. ( Nikon Corp. (Japan) ) Okamoto, K. Umemoto, T. Shimizu, H. Kojima, S. Hamashima, M. - Publication title:
- Emerging Lithographic Technologies VI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4688
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 535
- Page(to):
- 546
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444349 [0819444340]
- Language:
- English
- Call no.:
- P63600/4688
- Type:
- Conference Proceedings
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