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Inspection of EUV reticles

Author(s):
Pettibone, D.W. ( KLA-Tencor Corp. (USA) )
Veldman, A.
Liang, T. ( Intel Corp. (USA) )
Stivers, A.R.
Mangat, P.J. ( Motorola (USA) )
Lu, B.
Hector, S.D.
Wasson, J.R.
Bleadel, K.L. ( Lawrence Livermore National Lab. (USA) )
Fisch, E. ( Mask Ctr. of Competency/Photronics (USA) )
Walker, D.M.
6 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part One
Page(from):
363
Page(to):
374
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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