New PTB reflectometer for the characterization of large optics for the extreme-ultraviolet spectral region

New PTB reflectometer for the characterization of large optics for the extreme-ultraviolet spectral region

Author(s):

Tuemmler, J. ( Physikalisch-Technische Bundesanstalt (Germany) )

Poier, M. ( ACCEL Instruments GmbH (Germany) )

Klein, U.

Diete, W.

5 more

Publication title:

Emerging Lithographic Technologies VI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4688

Pub. Year:

2002

Vol.:

Part One

Page(from):

338

Page(to):

347

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444349 [0819444340]

Language:

English

Call no.:

P63600/4688

Type:

Conference Proceedings

Details

TDL ID:	ZA00012519
Series ID:	PA00000029
Conf. info. (Name):	Emerging lithographic technologies
Conf. info. (Number):	2002 : 6th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2002.03.05-2002.03.07

Similar Items:

1 Conference Proceedings High-accuracy detector calibration for EUV metrology at PTB Scholze, F., Brandt, G.M., Mueller, P., Meyer, B., Scholz, F., Tuemmler, J., Vogel, K., Ulm, G. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Irradiation of EUV multilayer optics with synchrotron radiation of a different time structure Klein, R., Scholze, F., Thornagel, R., Tuemmler, J., Wedowski, M., Jansen, R., Mertens, B., van de Runstraat, A., Ulm, … SPIE-The International Society for Optical Engineering
2 Conference Proceedings Characterization of the PTB EUV reflectometry facility for large EUVL optical components Tuemmler, J., Blume, H., Brandt, G., Eden, J., Meyer, B., Scherr, H., Scholz, F., Scholze, F., Ulm, G. SPIE-The International Society for Optical Engineering	8 Conference Proceedings High-accuracy x-ray detector calibration at PTB Krumrey, M. K., Scholze, F., Ulm, G. SPIE - The International Society of Optical Engineering
3 Conference Proceedings High-accuracy EUV metrology of PTB using synchrotron radiation Scholze,F., Beckhoff,B., Brandt,G., Fliegauf,R., Gottwald,A., Klein,R., Meyer,B., Schwarz,U.D., Thornagel,R., … SPIE-The International Society for Optical Engineering	9 Conference Proceedings Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB[6151-18] Laubis, C., Buchholz, C., Fischer, A., Ploger, S., Scholz, F., Wagner, H., Scholze, F., Ulm, G., Enkisch, H., Mullender, … SPIE - The International Society of Optical Engineering
4 Conference Proceedings New laboratory EUV reflectometer for large optics using a laser plasma source Loyen, L., Boettger, T., Braun, S., Mai, H., Leson, A., Scholze, F., Tuemmler, J., Ulm, G., Legall, H., Nickles, P.V., … SPIE-The International Society for Optical Engineering	10 Conference Proceedings Lifetime testing of EUV optics using intense synchrotron radiation at the PTB Radiometry Laboratory Klein,R., Gottwald,A., Scholze,F., Thornagel,R., Tummler,J., Ulm,G., Wedowski,M., Stietz,F., Mertens,B., Koster,N.B., … SPIE-The International Society for Optical Engineering
5 Conference Proceedings Characterization of a laser-produced plasma source for a laboratory EUV reflectometer Scholze, F., Scholz, F., Tuemmler, J., Ulm, G., Legall, H., Nickles, P.-V., Sandner, W., Stiel, H., Loyen, L. SPIE-The International Society for Optical Engineering	11 Conference Proceedings High-accuracy calibration of the HXDS flow proportional counter for AXAF at the PTB Laboratory at BESSY Auerhammer, J.M., Brandt, G., Scholze, F., Thornagel, R., Ulm, G., Wargelin, B.J., McDermott, W.C., Norton, T.J., Evans, … SPIE
6 Conference Proceedings New PTB beamlines for high-accuracy EUV reflectometry at BESSY ？ Bijkerk,F., Beckhoff,B., Brandt,G., Fliegauf,R., Klein,R., Meyer,B., Rost,D., Schmitz,D., Veldkamp,M., Weser,J., Ulm,G., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings High-throughput EUV reflectometer for EUV mask blanks Lebert, R., Wies, C., Juschkin, L., Jaegle, B., Meisen, M., Aschke, L., Sobel, F., Seitz, H., Scholze, F., Ulm, G., … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12