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Power scale-up of the extreme-ultraviolet electric capillary discharge source

Author(s):
Fornaciari, N.R. ( Sandia National Labs. (USA) )
Bender, H.
Buchenauer, D.
Dimkoff, J.L. ( Univ. of California/Berkeley (USA) )
Kanouff, M.P. ( Sandia National Labs. (USA) )
Karim, S.
Romeo, C. ( International SEMATECH (USA) )
Shimkaveg, G.M. ( CREOL/Univ. of Central Florida (USA) )
Silfvast, W.T.
Stewart, K.D. ( Sandia National Labs. (USA) )
5 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part One
Page(from):
110
Page(to):
121
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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