Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography

Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography

Author(s):

Subramanian, V.R. ( Univ. of Alberta (Canada) )
DeCorby, R.G.
McMullin, J.N.
Haugen, C.J. ( TRLabs (Canada) )
Belov, M. ( Univ. of Alberta (Canada) )

Publication title:

Silicon-based and Hybrid Optoelectronics IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4654

Pub. Year:

2002

Page(from):

45

Page(to):

53

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443939 [081944393X]

Language:

English

Call no.:

P63600/4654

Type:

Conference Proceedings

Details

TDL ID:	ZA00012482
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Silicon-based and hybrid optoelectronics
Conf. info. (Number):	2002 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2002.01.23-2002.01.24

Similar Items:

1 Conference Proceedings Grating-assisted optical add-drop filter modeling and fabrication Bryce, R.M., DeCorby, R.G., Haugen, C.J., Tsui, Y.Y., McMullin, J.N. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Broadband impedance-matched metal-semiconductor-metal photodetector arrays DeCorby,R.G., Hnatiw,A.J.P., Boertjes,D.B., McMullin,J.N., MacDonald,R.I. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Integrated diffraction grating for lab-on-a-chip microspectrometers Chen, X., McMullin, J.N., Haugen, C.J., DeCorby, R.G. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Trench isolated rib waveguides on silicon-on-insulator Turnbull, A. E., Waldron, P. D., Picard, M. -J., Tarr, N. G., Jessop, P. E. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Design of an electro-optic-polymer-based Mach-Zehnder modulator Haugen,C.J., DeCorby,R.G., McMullin,J.N., Pulikkaseril,C. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Application of long period gratings to integrated optical power splitters C. Wong, J. N. McMullin, C. J. Haugen SPIE - The International Society of Optical Engineering
4 Conference Proceedings Coarse WDM demultiplexer fabricated with deep x-ray lithography Chen, X., McMullin, J. N., Haugen, C. J., DeCorby, R. G., Klymyshyn, D. M., Achenbach, S. C., Mohr, J. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Laser fabrication of integrated microfluidic/micro-optic systems McMullin,J.N. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Characterization of integrated Bragg gratings on silicon-on-insulator rib waveguides Chan, S.P., Passaro, V.M.N., Lim, S.T., Png, C.E., Headley, W., Masanovic, G., Reed, Graham T., Atta, R.M.H., Ensell, … SPIE - The International Society of Optical Engineering	11 Conference Proceedings Stress-induced birefringence in silicon-on-insulator (SOI) waveguides Ye, W.N., Xu, D.-X., Janz, S., Cheben, P., Delage, A., Picard, M.-J., Lamontagne, B., Tarr, N.G. SPIE - The International Society of Optical Engineering
6 Conference Proceedings A four-channel optoelectronic switch for use in WDM networks Hnatiw,A.J.P., Boertjes,D.W., DeCorby,R.G., McMullin,J.N., Corazza,D.J., MacDonald,R.I., Johnson,E. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device Liu, W.-J., Lai, Y.-C., Weng, M.-H., Cheng, C.-M., Lee, P.-H. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12