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Crack-free laser processing of glass substrate and its mechanisms

Author(s):
Hong, M.H. ( Data Storage Institute (Singapore) )
Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Wu, D.J. ( Data Storage Institute (Singapore) )
Wong, L.L.
Lu, Y.F.
Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Chong, T.C. ( Data Storage Institute (Singapore) )
2 more
Publication title:
Photon Processing in Microelectronics and Photonics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4637
Pub. Year:
2002
Page(from):
270
Page(to):
279
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443762 [081944376X]
Language:
English
Call no.:
P63600/4637
Type:
Conference Proceedings

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