The critical role of metrology in nanotechnology
- Author(s):
- Schattenburg, M.L. ( Massachusetts Institute of Technology (USA) )
- Smith, H.I.
- Publication title:
- Nanostructure Science, Metrology, and Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4608
- Pub. Year:
- 2002
- Page(from):
- 116
- Page(to):
- 124
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443472 [0819443476]
- Language:
- English
- Call no.:
- P63600/4608
- Type:
- Conference Proceedings
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