Blank Cover Image

The critical role of metrology in nanotechnology

Author(s):
Publication title:
Nanostructure Science, Metrology, and Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4608
Pub. Year:
2002
Page(from):
116
Page(to):
124
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443472 [0819443476]
Language:
English
Call no.:
P63600/4608
Type:
Conference Proceedings

Similar Items:

Smith H. I., Schattenburg M. L.

Kluwer Academic Publishers

7 Conference Proceedings Scatterometry-based overlay metrology

Huang, H.-T., Raghavendra, G., Sezginer, A., Johnson, K., Stanke, F.E., Zimmerman, M.L., Cheung, C., Miyagi, M., Singh, …

SPIE-The International Society for Optical Engineering

Smith J. H., Schattenburg L. M.

Kluwer Academic Publishers

Krebs,H.I., Hogan,N., Aisen,M.L., Volpe,B.T.

SPIE-The International Society for Optical Engineering

Dewey,D., Markert,T.H., Schattenburg,M.L.

SPIE-The International Society for Optical Engineering

Shelley,S.J., Vold,H.I., Mains,M.L., Sharp,T.

Society for Experimental Mechanics

Forest, C.R., Schattenburg, M.L., Chen, C.G., Heilmann, R.K., Konkola, P.T., Przbylowski, J., Sun, Y., You, J., Kahn, …

SPIE-The International Society for Optical Engineering

Dowell, M.L., Jones, R.D., Laabs, H., Cromer, C.L., Morton, R.D.

SPIE-The International Society for Optical Engineering

Bergner Jr.,H.W., Cohen,L.M., Schattenburg,M.L., Monnelly,G.P.

SPIE-The International Society for Optical Engineering

Stirton, J.B., Miller, C.W., Viswanathan, A., Miyagi, M., Lane, L., Laughery, M.A., Parikh, T., Chan, K.C., Sezginer, A.

SPIE-The International Society for Optical Engineering

L. Pfitzner, A. Nutsch, R. Oechsner, M. Pfeffer, E. Don

Electrochemical Society

Rasmussen, A.P., Aquila, A., Bookbinder, J., Chang, C.-H., Gullikson, E.M., Heilmann, R.K., Kahn, S.M., Paerels, F., …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12