Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces

Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces

Author(s):: Hansen, R.S. ( Riso National Lab. (Denmark) )
Publication title:: Selected papers from Fifth International Conference on Correlation Optics : 10-13 May, 2001, Chernivtsi, Ukraine
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4607
Pub. Year:: 2002
Page(from):: 178
Page(to):: 183
Pages:: 6
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819443465 [0819443468]
Language:: English
Call no.:: P63600/4607
Type:: Conference Proceedings

Details

TDL ID:	ZA00012435
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Correlation Optics
Conf. info. (Number):	2001 : 5th
Conf. info. (Venue):	Chernivtsi, Ukraine
Conf. info. (Date):	2001.05.10-2001.05.13

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