Microstructure of oxygen-rich silicon oxynitride

Microstructure of oxygen-rich silicon oxynitride

Author(s):

Dan, Y. ( Tsinghua Univ. (China) )
Yue, R.
Wang, Y.
Yao, Y.
Liu, L.

Publication title:

Fiber optics and optoelectronics for network applications : 7-9 November 2001, Nanjing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4603

Pub. Year:

2001

Page(from):

192

Page(to):

195

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443427 [0819443425]

Language:

English

Call no.:

P63600/4603

Type:

Conference Proceedings

Details

TDL ID:	ZA00012431
Series ID:	PA00000029
Conf. info. (Name):	Fiber optics and optoelectronics for network applications
Conf. info. (Number):	2001
Conf. info. (Venue):	Nanjing, China
Conf. info. (Date):	2001.11.07-2001.11.09

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