Novel micromachined uncooled infrared detector employing a-Si:H TFT as thermosensitive element

Novel micromachined uncooled infrared detector employing a-Si:H TFT as thermosensitive element

Author(s):

Dong, L. ( Tsinghua Univ. (China) )
Liu, L.
Yue, R.

Publication title:

Semiconductor Optoelectronic Device Manufacturing and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4602

Pub. Year:

2001

Page(from):

344

Page(to):

350

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443410 [0819443417]

Language:

English

Call no.:

P63600/4602

Type:

Conference Proceedings

Details

TDL ID:	ZA00012430
Series ID:	PA00000029
Conf. info. (Name):	Semiconductor optoelectronic device manufacturing and applications
Conf. info. (Number):	2001
Conf. info. (Venue):	Nanjing, China
Conf. info. (Date):	2001.11.07-2001.11.09

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