Microstructure of Ta2O5 insulator film and the I-V characteristics of the MIM thin film diode with different heat treatment

Microstructure of Ta2O5 insulator film and the I-V characteristics of the MIM thin film diode with different heat treatment

Author(s):

Huang, H. ( Southeast Univ. (China) )

Zhang, H.

Zhong, R.

Tang, Z. ( Jiangsu Mobile Telecommunication Co. (China) )

Wang, Z. ( Southeast Univ. (China) )

Wang, S. ( Nanjing Institute of Technology (China) )

1 more

Publication title:

Semiconductor Optoelectronic Device Manufacturing and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4602

Pub. Year:

2001

Page(from):

178

Page(to):

183

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443410 [0819443417]

Language:

English

Call no.:

P63600/4602

Type:

Conference Proceedings

Details

TDL ID:	ZA00012430
Series ID:	PA00000029
Conf. info. (Name):	Semiconductor optoelectronic device manufacturing and applications
Conf. info. (Number):	2001
Conf. info. (Venue):	Nanjing, China
Conf. info. (Date):	2001.11.07-2001.11.09

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