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Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage

Author(s):
Chu, J. ( Univ. of Science and Technology of China (China) )
Lu, J.
Wu, Y.
Huang, W.
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Itoh, T. ( Univ. of Tokyo (Japan) )
Suga, T.
2 more
Publication title:
Micromachining and Microfabrication Process Technology and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4601
Pub. date:
2001
Page(from):
379
Page(to):
383
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
Language:
English
Call no.:
P63600/4601
Type:
Conference Proceedings

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