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Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching

Author(s):
Pan, Y. ( Changchun Institute of Optics,Fine Mechanics, and Physics (China) )
Ning, Y. ( Lab. of Excited State Processes (China) )
Qin. L. ( Changchun Institute of Optics,Fine Mechanics and Physics (China) )
Suo, H.
Liu, Y.
Wang, L. ( Lab. of Excited State Processes (China) )
1 more
Publication title:
Micromachining and Microfabrication Process Technology and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4601
Pub. date:
2001
Page(from):
360
Page(to):
362
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
Language:
English
Call no.:
P63600/4601
Type:
Conference Proceedings

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