Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching
- Author(s):
Pan, Y. ( Changchun Institute of Optics,Fine Mechanics, and Physics (China) ) Ning, Y. ( Lab. of Excited State Processes (China) ) Qin. L. ( Changchun Institute of Optics,Fine Mechanics and Physics (China) ) Suo, H. Liu, Y. Wang, L. ( Lab. of Excited State Processes (China) ) - Publication title:
- Micromachining and Microfabrication Process Technology and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4601
- Pub. Year:
- 2001
- Page(from):
- 360
- Page(to):
- 362
- Pages:
- 3
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- Language:
- English
- Call no.:
- P63600/4601
- Type:
- Conference Proceedings
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