Surface relief of TiNiCu thin films
- Author(s):
Cheng, X. ( Shanghai Jiaotong Univ. (China) ) Xu, D. Cai, B. Wang, L. Chen, J. Li, G. Xu, S. - Publication title:
- Micromachining and Microfabrication Process Technology and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4601
- Pub. Year:
- 2001
- Page(from):
- 340
- Page(to):
- 345
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- Language:
- English
- Call no.:
- P63600/4601
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
American Chemical Society |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Progress in Research and Mass Production of Large-Scale Tandem Thin Film Si Solar Modules at Chint Solar
Materials Research Society |
Elsevier |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |